Product Model

VTC-600-2HD

Installation Conditions

This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh.

1. Water: The equipment is equipped with a self-circulating water cooler (filling with pure water or deionized water)

2. Electricity: AC220V 50Hz, must have good grounding

3. gas: The equipment chamber needs to be filled with argon gas (purity 99.99% or more), and argon gas cylinders (with Ø6mm double ferrule joints) and pressure reducing valve need to be provided by users.

4. Workbench: size 1500mm×600mm×700mm, bearing more than 200kg

5. Ventilation device: needed

Major Parameters

(Specification)

1. Power supply voltage: 220V 50Hz

2. Power: 900W

3. Inner diameter of Chamber: Ø300mm

4. Limit of vacuum degree: 9.0×10-4Pa

5. Heating temperature of sample stage: RT-500℃, accuracy ±1℃ (Temperature can be increased according to actual needs.)

6. Number of target guns: 2 pcs (other quantities for option)

7. Cooling method of target gun: water cooling

8. Size of target material: Ø2″, thickness 0.1-5mm (different thicknesses due to different target materials)

9. DC sputtering power: 500W; RF sputtering power: 300W (The type of target power supply is optional, choosing two DC power supplies or two RF power supplies, or one DC power supply plus one RF power supply.)

10. Sample stage: Ø140mm, optional bias voltage function can be installed according to customer requirements to achieve higher quality of coating.

11. Speed of sample stage: adjustable within 1rpm-20rpm

12. Working gas: Ar and other inert gases

13. Intake air path: Mass flow meter controls 2 air-intake paths, one is 100SCCM and the other is 200SCCM.

Product Dimension and Weight

1. main machine dimension: 500mm×560mm×660mm

2. Overall dimension: 1300mm×660mm×1200mm

3. Vacuum chamber dimension: φ300×300mm

4. Weight: 160kg 

Standard Accessories

1. DC Power Control System: 1 set

2. RF Power Control System: 1 set

3. Film Thickness Monitor System: 1 set

4. Molecular Pump (imported from Germany): 1 pcs

5. Water Cooler: 1 pcs

6. Polyester PU pipe (Ø6mm): 4m

Optional Accessories

Various target materials such as gold, indium, silver, platinum, etc.