VTC-200PV Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The chamber of VTC-200PV vacuum spin coater can be vacuumized to coat the sample under completely vacuum condition, which is suitable for film materials that are easily oxidized and deteriorated in air. A clamp is used to fix the sample when the chamber is vacuumized. The equipment can store 12 sets of programs, and each set contains 6 running stages.
VTC-200PV Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The chamber of VTC-200PV vacuum spin coater can be vacuumized to coat the sample under completely vacuum condition, which is suitable for film materials that are easily oxidized and deteriorated in air. A clamp is used to fix the sample when the chamber is vacuumized. The equipment can store 12 sets of programs, and each set contains 6 running stages.
Main Features
1. The equipment can store 12 sets of programs, and each set contains 6 running stages. The setting range of the acceleration and deceleration rate for each stage: 100rpm/s-2000rpm/s, time range for each stage: 0-60s
2. The sample is fixed by means of vacuum adsorption and it can also be fixed by means of bonding or clamping, which is easy to operate.
3. The degree of vacuum can reach -0.08MPa.
4. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.
5. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.
6. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness.
7. The oilless parallel-bar vacuum pump is used when the sample is fixed by means of vacuum absorption, and it has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.
8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).
9. When coating is performed under vacuum condition, the sample substrate is fixed by means of bonding or clamping.
10. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.
11. English operating system
12. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.
13. The controller adopts a control box with LCD numerical display, which is more intuitive and reliable.
Technical Parameters
Product Name | VTC-200PV Vacuum Spin Coater |
Product Model | VTC-200PV |
Installation Conditions | This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: no need 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg 5. Ventilation device: needed |
Main Parameters (Specification) | 1. Power supply: 220V 50HZ 2. Motor power: 350W/24V 3. Speed range: 500rpm-6000rpm 4. 12 groups of programs can be stored, each group includes 6 running stages. 5. The setting range of the acceleration and deceleration rate of each stage: 100rpm/s-2000rpm/s, time range of each stage: 0-60s. 6. Size of chuck: φ100mm 7. The vacuum degree of the chamber can reach 1 Torr (VRD-8 mechanical pump works continuously) |
Product Dimension and Weight | Dimension: φ250mm×300mm Weight:25kg |
Standard Accessories
No. | name | qty | picture |
1 | Vacuum Chuck (φ100mm) | 1 pcs |
|
2 | Clamping Plate 2”, 3”, 4” | 1 pcs |
|
3 | Central Positioner/Locator (including 4 positioning studs) | 1 pcs |
|
4 | Epoxy Injector/Syringe | 1 pcs |
|
5 | Oilless Vacuum Pump | 1 pcs |
|
6 | Double-Click Rotary Vane Vacuum Pump VRD-8 | 1 pcs |
|
Optional Accessories
No. | name | functional type | picture |
1 | Vacuum Chuck of other specifications | (optional) |
|
2 | Pipette (made in China) | (optional) |
|
3 | Pipette (imported) | (optional) |
|
4 | VRD-16 Mechanical Pump | (optional) |
|
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
18790258621 
