VTC-100PA-UV UV Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The upper cover adopts UV light source and is especially suitable for materials sensitive to UV light, which can quickly solidify the coated film. In addition, the UV lamp also has a polymerization function, which can polymerize the monomer into a polymer film.
VTC-100PA-UV UV Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. The upper cover adopts UV light source and is especially suitable for materials sensitive to UV light, which can quickly solidify the coated film. In addition, the UV lamp also has a polymerization function, which can polymerize the monomer into a polymer film.
Main Features
1.The sample is fixed by means of vacuum adsorption, which is easy to operate and convenient to take and place samples, which can be customized as required.
2. The upper cover adopts UV light source, whose strength can be adjusted within a certain range.
3. The injection hole is located in the center of upper cover and is equipped with a rubber plug, which is applied when sealed environment is required for the chamber.
4. The gas inlet hole in the chamber is used to connect to protective gas.
5. The motor part and the UV light control part are independently controlled. The motor speed regulation system is controlled by a single-board computer plus a LCD screen, the numerical display is more intuitive and reliable. The UV light is controlled by a PLC controller with strong anti-interference.
6. The coating speed of this machine is 500 to 1000RPM. 12 groups of programs can be stored, each group of programs contains 6 operating stages, and the operating parameters of each stage can be set independently to make the speed slowly increase to the limit, which is conducive to form uniform film on the sample surface, and will not waste too much.
7. The UV vacuum spin coater starts quickly and has a stable rotation speed, which can ensure the uniformity and consistency of film thickness.
8. In the installation structure, shock absorption measures are taken to reduce noise during operation.
9. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.
Technical Parameters
Product Name | VTC-100PA-UV UV Spin Coater |
Product Model | VTC-100PA-UV |
Main Parameters (Specification) | 1. Power supply: AC220/110V 50/60Hz 2. Motor power: 350W/24V 3. Speed range: 500rpm-10000rpm 4. Program operation: 1 group of programs can be stored and includes 2 running stages, time range of each stage: 0-60s. 5. Specification of chucks: φ19mm φ60mm 6. Specification of protective gas inlet hole: φ8mm 7. Specification of vacuum gas hole: φ8mm 8. Power range of UV lamp: 8-30W 9. Time setting range of UV lamp: 1-800S |
Product Dimension and Weight | Dimension: 450mm×280mm×340mm Weight:20kg |
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
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