VTC-100PA Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. It can be used for strong acid and strong alkali coating solution. The equipment is equipped with two vacuum chucks of different sizes (for standard) selected according to the size of the sample. The equipment can store 12 sets of programs, and each set contains 6 running stages.
VTC-100PA High Speed Spin Coater (10K rpm & 5" Max) for semiconductor process, crystal, optical disc, plate making and surface coating
VTC-100PA Vacuum Spin Coater is suitable for semiconductor process, crystal, optical disc, plate making and surface coating, etc. It can be used for strong acid and strong alkali coating solution. The equipment is equipped with two vacuum chucks of different sizes (for standard) selected according to the size of the sample. The equipment can store 12 sets of programs, and each set contains 6 running stages.
Main Features
1. The sample is fixed by means of vacuum adsorption, which is easy to operate.
2. The degree of vacuum can reach -0.08MPa.
3. Samples can be easily centered using the positioning tool to reduce vibration or fly-outs caused by misalignment.
4. Different chucks can be used according to sample specifications, and the replacement is convenient and simple.
5. A 24V brushless DC motor is adopted and it has the advantages of high reliability, strong adaptability, simple repair and maintenance, low noise, small vibration, stable operation, fast and stable startup, stable operation after acceleration, to ensure the consistency and uniformity of coating thickness
6. The oilless parallel-bar vacuum pump has the advantages of small size, simple structure, easy operation, convenient maintenance, and no environmental pollution.
7. The chamber is made of PP material with longer service life to improve the resistance abilities of chemical corrosion and excellent stress crack, and the machine body adopts cast aluminum structure, which is durable and light in weight.
8. Coating can be carried out in an inert gas atmosphere (such as Ar, N2).
9. English operating system
10. It has the function of open-cover protection. When the top cover is opened during the coating process or at the end of the coating, the machine immediately decelerates rapidly until it stops.
11. The control interface adopts a touch screen plus single-board computer control system, and the numerical display is more intuitive and reliable.
Technical Parameters
Product Name | VTC-100PA Vacuum Spin Coater |
Product Model | VTC-100PA |
Installation Conditions | This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: equipped with water inlet and outlet 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg 5. Ventilation device: needed |
Main parameters (Specification) | 1. Power supply: 220V 50Hz 2. Motor power: 400W 3. Speed range: 500rpm-10000rpm 4. Program operation: 12 groups of programs can be stored, each group includes 6 running stages, time range of each stage: 0-60s. 5. The setting range of the acceleration and deceleration rate: 100rpm/s-2000rpm/s 6. The machine can be equipped with heating function: * VTC-100PA-II: RT-200℃, the entire chamber and the chuck are made of PTFE, which is more resistant to high temperature and corrosion. * VTC-100PA-I: RT-100℃, the chuck is made of PTFE, the upper cover and sink/water tank are made of polypropylene. * The temperature uses an independent controller, not related to the host program control |
Product Dimension and Weight | Dimension: 450mm×280mm×340mm Weight:20kg |
Standard Accessories
No. | name | qty | picture |
1 | Vacuum Chuck (including O-ring) (Ø19mm andØ60mm) | 2 pcs |
|
2 | Central Positioner/Locator (including 4 positioning studs) | 1 pcs |
|
3 | Epoxy Injector/Syringe (20ml) | 1 pcs |
|
4 | Injector/Syringe Bracket | 1 pcs | |
5 | Oilless Vacuum Pump | 1 pcs |
|
6 | Rubber Pipe (including clamp) | 1 pcs |
Optional Accessories
No. | name | functional type | picture |
1 | Vacuum Chucks of other specifications | (optional) |
|
2 | Pipette (made in China) | (optional) |
|
3 | Pipette (imported) | (optional) |
|
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)
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