VTC-100B Compact Spin Coater (8K rpm, 4" Wafer Max.) Low Chuck Deisgn
Vacuum Spin Coater is an upgraded version of VTC-100 vacuum spin coater. The upper cover folded for opening and closing, and is equipped with a safety lock. At the same time, it has the function of open-cover protection to better guarantee the safety of the operator.
Main Features
1. The speed is controlled by a two-stage program: the glue is injected in the first low-speed stage, and the glue is leveled in the second high-speed stage.
2. The sample is fixed by vacuum adsorption, which is easy to operate and convenient to take and place the sample.
3. Cast aluminum structure, stable operation and low noise
4. The speed regulation is controlled by a single-chip computer with high anti-interference, and the speed is very stable within the range of 1000 to 8000RPM.
5. With open-cover protection function
6. With countdown function
7. A structure (in which the vacuum chuck surface is lower than the chamber) is adopted to ensure that the substrate will not be thrown out of the chamber and/or hurt the experimenter in case that the sample is not stuck tightly onto the sample plate.
TechnicalParameters
Product Name | VTC-100B Vacuum Spin Coater |
Product Model | VTC-100B |
Installation Conditions | This equipment is required to be used at an altitude of 1000m or less, a temperature of 25℃±15℃, and a humidity of 55%Rh±10%Rh. 1. Water: equipped with water inlet and outlet 2. Electricity: AC220V 50Hz, must have good grounding 3. gas: N/A 4. Workbench: size 600mm×600mm×700mm, bearing more than 50kg 5. Ventilation device: needed |
Main Parameters (Specification) | 1. AC220/110V 50/60Hz 2. Power: 150W 3. Rotation speed: 500rpm-8000rpm 4. A two-step coating program can be set, and the speed stability is ±1%, making the coating more uniform. SPD1 rotation speed: valid within 500 to 8000RPM T1 time: valid within 1 to 600s SPD2 rotation speed: valid within 500 to 8000RPM T2 time: valid within 1 to 600s 5. The diameter of the sample plate: 100mm, counter clockwise rotation |
Product Dimension and Weight | Dimension: 260mm×380mm×300mm weight:20kg |
StandardAccessories
No. | name | qty | picture |
1 | Vacuum Chuck (PP,Ø25mm,Ø50mm,Ø100mm) | 1 pcs each | |
2 | Injector/Syringe | 1 pcs | |
3 | Oilless Vacuum Pump | 1 pcs | |
Warranty
One year limited with lifetime support (not including rusted parts due to inadequate storage conditions)